JPH0542307Y2 - - Google Patents

Info

Publication number
JPH0542307Y2
JPH0542307Y2 JP1988146750U JP14675088U JPH0542307Y2 JP H0542307 Y2 JPH0542307 Y2 JP H0542307Y2 JP 1988146750 U JP1988146750 U JP 1988146750U JP 14675088 U JP14675088 U JP 14675088U JP H0542307 Y2 JPH0542307 Y2 JP H0542307Y2
Authority
JP
Japan
Prior art keywords
cylinder
valve body
piston
valve
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988146750U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0267182U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988146750U priority Critical patent/JPH0542307Y2/ja
Publication of JPH0267182U publication Critical patent/JPH0267182U/ja
Application granted granted Critical
Publication of JPH0542307Y2 publication Critical patent/JPH0542307Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
JP1988146750U 1988-11-10 1988-11-10 Expired - Lifetime JPH0542307Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988146750U JPH0542307Y2 (en]) 1988-11-10 1988-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988146750U JPH0542307Y2 (en]) 1988-11-10 1988-11-10

Publications (2)

Publication Number Publication Date
JPH0267182U JPH0267182U (en]) 1990-05-21
JPH0542307Y2 true JPH0542307Y2 (en]) 1993-10-25

Family

ID=31416530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988146750U Expired - Lifetime JPH0542307Y2 (en]) 1988-11-10 1988-11-10

Country Status (1)

Country Link
JP (1) JPH0542307Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123980U (ja) * 1982-02-17 1983-08-23 株式会社日立製作所 ストツプバルブ
JPS6124584U (ja) * 1984-07-20 1986-02-13 大亜真空株式会社 コンパクトバルブ

Also Published As

Publication number Publication date
JPH0267182U (en]) 1990-05-21

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